Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674366 | Method and apparatus for fabrication of dielectric thin film | Shigenori Hayashi, Kazuki Komaki, Takeshi Kamada, Takashi Deguchi, Ryoichi Takayama +1 more | 1997-10-07 |
| 5672252 | Method and apparatus for fabrication of dielectric film | Shigenori Hayashi, Kazuki Komaki, Takeshi Kamada, Takashi Deguchi, Ryoichi Takayama +1 more | 1997-09-30 |
| 5662965 | Method of depositing crystalline carbon-based thin films | Masahiro Deguchi, Takashi Hirao | 1997-09-02 |