Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674366 | Method and apparatus for fabrication of dielectric thin film | Shigenori Hayashi, Takeshi Kamada, Masatoshi Kitagawa, Takashi Deguchi, Ryoichi Takayama +1 more | 1997-10-07 |
| 5672252 | Method and apparatus for fabrication of dielectric film | Shigenori Hayashi, Takeshi Kamada, Masatoshi Kitagawa, Takashi Deguchi, Ryoichi Takayama +1 more | 1997-09-30 |