Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684574 | In-process film thickness monitoring system | Hideaki Yasui, Koichi Kotera, Yuuji Mukai, Hiroyoshi Tanaka, Takashi Hirao | 1997-11-04 |
AS
Akira Shiokawa
Overall (1997): #179,648 of 185,788Top 100%
1
Patents 1997