Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679500 | Method of forming micropatterns utilizing silylation and overall energy beam exposure | Takahiro Matsuo, Kazuhiro Yamashita, Masaru Sasago | 1997-10-21 |
| 5677112 | Process for forming a pattern on a semiconductor substrate using a deep ultraviolet absorbent composition | Fumiyoshi Urano, Keiji Oono, Hiroshi Matsuda, Satoshi Kobayashi | 1997-10-14 |
| 5658711 | Method of forming micropatterns | Takahiro Matsuo, Kazuhiro Yamashita, Masaru Sasago | 1997-08-19 |
| 5645628 | Electroless plating bath used for forming a wiring of a semiconductor device, and method of forming a wiring of a semiconductor device | Akemi Kawaguchi, Mikio Nishio, Shin Hashimoto | 1997-07-08 |