Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679500 | Method of forming micropatterns utilizing silylation and overall energy beam exposure | Takahiro Matsuo, Kazuhiro Yamashita, Masayuki Endo | 1997-10-21 |
| 5658711 | Method of forming micropatterns | Takahiro Matsuo, Kazuhiro Yamashita, Masayuki Endo | 1997-08-19 |