Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695910 | Resist composition for deep ultraviolet light | Fumiyoshi Urano, Takanori Yasuda, Akiko Katsuyama | 1997-12-09 |
| 5679500 | Method of forming micropatterns utilizing silylation and overall energy beam exposure | Takahiro Matsuo, Masayuki Endo, Masaru Sasago | 1997-10-21 |
| 5658711 | Method of forming micropatterns | Takahiro Matsuo, Masayuki Endo, Masaru Sasago | 1997-08-19 |