Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677112 | Process for forming a pattern on a semiconductor substrate using a deep ultraviolet absorbent composition | Fumiyoshi Urano, Hiroshi Matsuda, Masayuki Endo, Satoshi Kobayashi | 1997-10-14 |
| 5670299 | Pattern formation process | Fumiyoshi Urano, Hirotoshi Fujie, Takaaki Negishi | 1997-09-23 |
| 5627006 | Resist material | Fumiyoshi Urano, Hirotoshi Fujie | 1997-05-06 |