Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679405 | Method for preventing substrate backside deposition during a chemical vapor deposition operation | Michael E. Thomas, Everhardus P. van de Van | 1997-10-21 |
| 5620525 | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate | Everhardus P. van de Ven, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart | 1997-04-15 |
| 5605599 | Method of generating plasma having high ion density for substrate processing operation | Jeffrey C. Benzing, J. Kirkwood H. Rough | 1997-02-25 |