Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620525 | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate | Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart | 1997-04-15 |