Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5653813 | Cyclone evaporator | Edward J. McInerney, Michael N. Susoeff | 1997-08-05 |
| 5620525 | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate | Everhardus P. van de Ven, Eliot K. Broadbent, Barry Chin, Christopher W. Burkhart | 1997-04-15 |
| 5605599 | Method of generating plasma having high ion density for substrate processing operation | Eliot K. Broadbent, J. Kirkwood H. Rough | 1997-02-25 |