Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5648664 | BIFET vacuum tube replacement structure | Adrian I. Cogan, Neill Thornton | 1997-07-15 |
| 5605599 | Method of generating plasma having high ion density for substrate processing operation | Jeffrey C. Benzing, Eliot K. Broadbent | 1997-02-25 |