Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679405 | Method for preventing substrate backside deposition during a chemical vapor deposition operation | Michael E. Thomas, Eliot K. Broadbent | 1997-10-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679405 | Method for preventing substrate backside deposition during a chemical vapor deposition operation | Michael E. Thomas, Eliot K. Broadbent | 1997-10-21 |