Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698069 | Technique for detecting particles on a wafer support surface | Arun A. Aiyer | 1997-12-16 |
| 5666205 | Measuring method and exposure apparatus | Hiroki Tateno, Koji Kaise, Yuji Imai | 1997-09-09 |
| 5615006 | Imaging characteristic and asymetric abrerration measurement of projection optical system | Shigeru Hirukawa, Shinjiro Kondo, Takeshi Kato | 1997-03-25 |