Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5666205 | Measuring method and exposure apparatus | Koji Kaise, Kyoichi Suwa, Yuji Imai | 1997-09-09 |
| 5596204 | Method for aligning processing areas on a substrate with a predetermined position in a static coordinate system | Nobuyuki Irie, Shigeru Hirukawa | 1997-01-21 |