Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703675 | Projection-exposing apparatus with deflecting grating member | Naomasa Shiraishi, Masaomi Kameyama | 1997-12-30 |
| 5615006 | Imaging characteristic and asymetric abrerration measurement of projection optical system | Shinjiro Kondo, Takeshi Kato, Kyoichi Suwa | 1997-03-25 |
| 5596204 | Method for aligning processing areas on a substrate with a predetermined position in a static coordinate system | Nobuyuki Irie, Hiroki Tateno | 1997-01-21 |