Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5615006 | Imaging characteristic and asymetric abrerration measurement of projection optical system | Shigeru Hirukawa, Takeshi Kato, Kyoichi Suwa | 1997-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5615006 | Imaging characteristic and asymetric abrerration measurement of projection optical system | Shigeru Hirukawa, Takeshi Kato, Kyoichi Suwa | 1997-03-25 |