Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5666205 | Measuring method and exposure apparatus | Hiroki Tateno, Koji Kaise, Kyoichi Suwa | 1997-09-09 |
| 5661548 | Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal | — | 1997-08-26 |
| 5635722 | Projection exposure method and apparatus capable of performing focus detection with high accuracy | Shinji Wakamoto | 1997-06-03 |
| 5633101 | Mask and projection exposure method | — | 1997-05-27 |
| 5633698 | Exposure apparatus | — | 1997-05-27 |