Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5635722 | Projection exposure method and apparatus capable of performing focus detection with high accuracy | Yuji Imai | 1997-06-03 |
| 5617182 | Scanning exposure method | Hidemi Kawai, Fuyuhiko Inoue | 1997-04-01 |
| 5591958 | Scanning exposure method and apparatus | Kenji Nishi | 1997-01-07 |