Issued Patents 1997
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693439 | Exposure method and apparatus | Yasuaki Tanaka, Seiro Murakami | 1997-12-02 |
| 5682243 | Method of aligning a substrate | — | 1997-10-28 |
| 5674651 | Alignment method for use in an exposure system | — | 1997-10-07 |
| 5657129 | Method and apparatus for the alignment of a substrate | — | 1997-08-12 |
| 5646413 | Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement | — | 1997-07-08 |
| 5634231 | Semiconductor manufacturing apparatus | — | 1997-06-03 |
| 5591958 | Scanning exposure method and apparatus | Shinji Wakamoto | 1997-01-07 |