Issued Patents 1997
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700180 | System for real-time control of semiconductor wafer polishing | Gurtej S. Sandhu | 1997-12-23 |
| 5691235 | Method of depositing tungsten nitride using a source gas comprising silicon | Scott Meikle | 1997-11-25 |
| 5658183 | System for real-time control of semiconductor wafer polishing including optical monitoring | Gurtej S. Sandhu | 1997-08-19 |
| 5653619 | Method to form self-aligned gate structures and focus rings | Eugene H. Cloud, Tyler Lowrey, David A. Cathey, J. Brett Rolfson | 1997-08-05 |
| 5651855 | Method of making self aligned contacts to silicon substrates during the manufacture of integrated circuits | Charles H. Dennison | 1997-07-29 |
| 5643060 | System for real-time control of semiconductor wafer polishing including heater | Gurtej S. Sandhu | 1997-07-01 |
| 5618381 | Multiple step method of chemical-mechanical polishing which minimizes dishing | Chris C. Yu | 1997-04-08 |
| 5593927 | Method for packaging semiconductor dice | Warren M. Farnworth, Alan G. Wood, John O. Jacobson | 1997-01-14 |