Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5655869 | Device for coupling loading and unloading devices with semiconductor processing machines | Werner Scheler, Andreas Mages, Uwe Michl, Eberhard Gemkow, Alfred Schulz | 1997-08-12 |
| 5642978 | Device for handling disk-shaped objects in a handling plane of a local clean room | Klaus Schultz, Werner Scheler, Michael Heitmann, Axel Gaglin | 1997-07-01 |
| 5605428 | Device for indexing magazine compartments and wafer-shaped objects in the compartments | Andreas Birkner, Klaus Schultz | 1997-02-25 |