Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5642978 | Device for handling disk-shaped objects in a handling plane of a local clean room | Berndt Lahne, Klaus Schultz, Werner Scheler, Michael Heitmann | 1997-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5642978 | Device for handling disk-shaped objects in a handling plane of a local clean room | Berndt Lahne, Klaus Schultz, Werner Scheler, Michael Heitmann | 1997-07-01 |