Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5642978 | Device for handling disk-shaped objects in a handling plane of a local clean room | Berndt Lahne, Werner Scheler, Michael Heitmann, Axel Gaglin | 1997-07-01 |
| 5605428 | Device for indexing magazine compartments and wafer-shaped objects in the compartments | Andreas Birkner, Berndt Lahne | 1997-02-25 |