Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5655869 | Device for coupling loading and unloading devices with semiconductor processing machines | Berndt Lahne, Andreas Mages, Uwe Michl, Eberhard Gemkow, Alfred Schulz | 1997-08-12 |
| 5642978 | Device for handling disk-shaped objects in a handling plane of a local clean room | Berndt Lahne, Klaus Schultz, Michael Heitmann, Axel Gaglin | 1997-07-01 |
| 5636724 | Device for transferring a transport object between two end positions | Juergen Graefe, Andreas Mages, Andreas Birkner, Erich Adler | 1997-06-10 |