Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5655869 | Device for coupling loading and unloading devices with semiconductor processing machines | Werner Scheler, Berndt Lahne, Andreas Mages, Uwe Michl, Eberhard Gemkow | 1997-08-12 |