Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656535 | Storage node process for deep trench-based DRAM | Herbert L. Ho, Radhika Srinivasan, Scott D. Halle, Erwin Hammerl, Jack A. Mandelman +1 more | 1997-08-12 |
| 5643823 | Application of thin crystalline Si.sub.3 N.sub.4 liners in shallow trench isolation (STI) structures | Herbert L. Ho, Erwin Hammerl, J. Herbert Palm, Stephen G. Fugardi, Atul Ajmera +2 more | 1997-07-01 |
| 5622596 | High density selective SiO.sub.2 :Si.sub.3 N.sub.4 etching using a stoichiometrically altered nitride etch stop | Michael D. Armacost, Jeffrey P. Gambino, Son V. Nguyen | 1997-04-22 |