Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643823 | Application of thin crystalline Si.sub.3 N.sub.4 liners in shallow trench isolation (STI) structures | Herbert L. Ho, Erwin Hammerl, David M. Dobuzinsky, J. Herbert Palm, Atul Ajmera +2 more | 1997-07-01 |