Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5622596 | High density selective SiO.sub.2 :Si.sub.3 N.sub.4 etching using a stoichiometrically altered nitride etch stop | David M. Dobuzinsky, Jeffrey P. Gambino, Son V. Nguyen | 1997-04-22 |
| 5618379 | Selective deposition process | Steven A. Grundon, David L. Harmon, Son V. Nguyen, John F. Rembetski | 1997-04-08 |