Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5622596 | High density selective SiO.sub.2 :Si.sub.3 N.sub.4 etching using a stoichiometrically altered nitride etch stop | Michael D. Armacost, David M. Dobuzinsky, Jeffrey P. Gambino | 1997-04-22 |
| 5618379 | Selective deposition process | Michael D. Armacost, Steven A. Grundon, David L. Harmon, John F. Rembetski | 1997-04-08 |
| 5610441 | Angle defined trench conductor for a semiconductor device | Daniel Carl, Donald M. Kenney, Walter E. Mlynko | 1997-03-11 |