Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677000 | Substrate spin treating method and apparatus | Katsushi Yoshioka, Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi | 1997-10-14 |
| 5678116 | Method and apparatus for drying a substrate having a resist film with a miniaturized pattern | Hiroaki Sugimoto, Masaru Kitagawa | 1997-10-14 |
| 5656088 | Apparatus for dipping substrates in processing fluid | Tadashi MAEGAWA, Akihiko Hidaka, Toshio Hiroe, Hideki Hayashi | 1997-08-12 |
| 5647083 | Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus | Nobuyasu Hiraoka, Mitsuhiro Fujita, Masami Ohtani | 1997-07-15 |
| 5639301 | Processing apparatus having parts for thermal and non-thermal treatment of substrates | Shigeru Sasada, Kaoru Aoki, Mitsumasa Kodama, Yoshiteru Fukutomi, Hidekazu Inoue | 1997-06-17 |
| 5616247 | Method for separating a liquid mixture using a pervaporation membrane module unit | Masaaki Mita, Haruo Katsumata | 1997-04-01 |