Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677000 | Substrate spin treating method and apparatus | Katsushi Yoshioka, Tsuyoshi Mitsuhashi, Kenji Sugimoto | 1997-10-14 |
| 5639301 | Processing apparatus having parts for thermal and non-thermal treatment of substrates | Shigeru Sasada, Kaoru Aoki, Mitsumasa Kodama, Kenji Sugimoto, Hidekazu Inoue | 1997-06-17 |