Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639301 | Processing apparatus having parts for thermal and non-thermal treatment of substrates | Kaoru Aoki, Mitsumasa Kodama, Kenji Sugimoto, Yoshiteru Fukutomi, Hidekazu Inoue | 1997-06-17 |