Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5647083 | Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus | Kenji Sugimoto, Nobuyasu Hiraoka, Masami Ohtani | 1997-07-15 |
| 5599394 | Apparatus for delivering a silica film forming solution | Manabu Yabe, Masaru Kitagawa, Takafumi Ohki | 1997-02-04 |