Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5678116 | Method and apparatus for drying a substrate having a resist film with a miniaturized pattern | Kenji Sugimoto, Hiroaki Sugimoto | 1997-10-14 |
| 5601645 | Substrate holder for a substrate spin treating apparatus | Masahiro Nonomura | 1997-02-11 |
| 5599394 | Apparatus for delivering a silica film forming solution | Manabu Yabe, Takafumi Ohki, Mitsuhiro Fujita | 1997-02-04 |