Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689215 | Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor | Brett C. Richardson, Tuan Ngo | 1997-11-18 |
| 5679215 | Method of in situ cleaning a vacuum plasma processing chamber | Arthur K. Yasuda | 1997-10-21 |
| 5670066 | Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated | Luo Laizhong | 1997-09-23 |
| 5650032 | Apparatus for producing an inductive plasma for plasma processes | John H. Keller, John C. Forster, John E. Heidenreich, III | 1997-07-22 |
| 5612851 | Guard ring electrostatic chuck | John H. Keller, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1997-03-18 |