Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5612851 | Guard ring electrostatic chuck | Michael Barnes, John H. Keller, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1997-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5612851 | Guard ring electrostatic chuck | Michael Barnes, John H. Keller, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1997-03-18 |