Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686796 | Ion implantation helicon plasma source with magnetic dipoles | Roderick Boswell, Albert R. Ellingboe | 1997-11-11 |
| 5650032 | Apparatus for producing an inductive plasma for plasma processes | Michael Barnes, John C. Forster, John E. Heidenreich, III | 1997-07-22 |
| 5612851 | Guard ring electrostatic chuck | Michael Barnes, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 1997-03-18 |