Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686796 | Ion implantation helicon plasma source with magnetic dipoles | Albert R. Ellingboe, John H. Keller | 1997-11-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686796 | Ion implantation helicon plasma source with magnetic dipoles | Albert R. Ellingboe, John H. Keller | 1997-11-11 |