Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679215 | Method of in situ cleaning a vacuum plasma processing chamber | Michael Barnes | 1997-10-21 |
AY
Arthur K. Yasuda
Overall (1997): #174,686 of 185,788Top 95%
1
Patents 1997