Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670066 | Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated | Michael Barnes | 1997-09-23 |
LL
Luo Laizhong
Overall (1997): #182,853 of 185,788Top 100%
1
Patents 1997