Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5347592 | Pattern judging method and mask producing method using the pattern judging method | Hiroshi Yasuda, Kiichi Sakamoto | 1994-09-13 |
| 5304811 | Lithography system using charged-particle beam and method of using the same | Akio Yamada, Yoshihisa Oae, Tomohiko Abe | 1994-04-19 |