Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5359202 | Electron beam exposure apparatus employing blanking aperture array | Hiroshi Yasuda, Yoshihisa Oae | 1994-10-25 |
| 5304811 | Lithography system using charged-particle beam and method of using the same | Akio Yamada, Yoshihisa Oae, Satoru Yamazaki | 1994-04-19 |