Issued Patents 1989
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4888614 | Observation system for a projection exposure apparatus | Hideki Ina, Masao Kosugi | 1989-12-19 |
| 4886975 | Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces | Eiichi Murakami, Michio Kohno | 1989-12-12 |
| 4883359 | Alignment method and pattern forming method using the same | Hideki Ina | 1989-11-28 |
| 4875076 | Exposure apparatus | Makoto Torigoe | 1989-10-17 |
| 4871257 | Optical apparatus for observing patterned article | Michio Kohno | 1989-10-03 |
| 4865455 | Optical device having a variable geometry filter usable for aligning a mask or reticle with a wafer | Michio Kohno | 1989-09-12 |
| 4851882 | Illumination optical system | Kazuhiro Takahashi | 1989-07-25 |
| 4834540 | Projection exposure apparatus | Masao Totsuka, Hideki Ina | 1989-05-30 |
| 4831274 | Surface inspecting device for detecting the position of foreign matter on a substrate | Michio Kohno | 1989-05-16 |
| 4830499 | Optical device capable of maintaining pupil imaging | Michio Kohno, Hideki Ina | 1989-05-16 |
| 4814829 | Projection exposure apparatus | Masao Kosugi, Hideki Ina, Kazuhito Outsuka, Shigeki Ogawa, Masao Totsuka +1 more | 1989-03-21 |
| 4799791 | Illuminance distribution measuring system | Hiroshi Echizen, Masakatsu Ota | 1989-01-24 |
| 4798450 | Imaging optical system | — | 1989-01-17 |
| 4795911 | Surface examining apparatus for detecting the presence of foreign particles on the surface | Michio Kohno, Eiichi Murakami | 1989-01-03 |