Issued Patents 1989
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4888614 | Observation system for a projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina | 1989-12-19 |
| 4843563 | Step-and-repeat alignment and exposure method and apparatus | Kazuo Takahashi | 1989-06-27 |
| 4823012 | Step and repeat exposure apparatus having improved system for aligning | — | 1989-04-18 |
| 4814829 | Projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina, Kazuhito Outsuka, Shigeki Ogawa, Masao Totsuka +1 more | 1989-03-21 |