Issued Patents 1989
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4888614 | Observation system for a projection exposure apparatus | Akiyoshi Suzuki, Masao Kosugi | 1989-12-19 |
| 4886974 | Mark detecting device for detecting the center of a mark by detecting its edges | — | 1989-12-12 |
| 4883359 | Alignment method and pattern forming method using the same | Akiyoshi Suzuki | 1989-11-28 |
| 4861162 | Alignment of an object | — | 1989-08-29 |
| 4834540 | Projection exposure apparatus | Masao Totsuka, Akiyoshi Suzuki | 1989-05-30 |
| 4830499 | Optical device capable of maintaining pupil imaging | Michio Kohno, Akiyoshi Suzuki | 1989-05-16 |
| 4814829 | Projection exposure apparatus | Masao Kosugi, Akiyoshi Suzuki, Kazuhito Outsuka, Shigeki Ogawa, Masao Totsuka +1 more | 1989-03-21 |