Issued Patents 1989
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886975 | Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces | Eiichi Murakami, Akiyoshi Suzuki | 1989-12-12 |
| 4871257 | Optical apparatus for observing patterned article | Akiyoshi Suzuki | 1989-10-03 |
| 4865455 | Optical device having a variable geometry filter usable for aligning a mask or reticle with a wafer | Akiyoshi Suzuki | 1989-09-12 |
| 4830499 | Optical device capable of maintaining pupil imaging | Hideki Ina, Akiyoshi Suzuki | 1989-05-16 |
| 4831274 | Surface inspecting device for detecting the position of foreign matter on a substrate | Akiyoshi Suzuki | 1989-05-16 |
| 4795911 | Surface examining apparatus for detecting the presence of foreign particles on the surface | Eiichi Murakami, Akiyoshi Suzuki | 1989-01-03 |