Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4806773 | Wafer position detecting method and apparatus | Ryozo Hiraga | 1989-02-21 |
| 4799791 | Illuminance distribution measuring system | Masakatsu Ota, Akiyoshi Suzuki | 1989-01-24 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4806773 | Wafer position detecting method and apparatus | Ryozo Hiraga | 1989-02-21 |
| 4799791 | Illuminance distribution measuring system | Masakatsu Ota, Akiyoshi Suzuki | 1989-01-24 |