Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838387 | Fast etching system and process | Stephen E. Savas | 2005-01-04 |
| 6805139 | Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing | Stephen E. Savas, Robert Guerra, Wolfgang Helle | 2004-10-19 |
| 6706142 | Systems and methods for enhancing plasma processing of a semiconductor substrate | Stephen E. Savas, Mark Kushner, Ronald L. Kinder | 2004-03-16 |
| 6501636 | Electrostatic clamp for holding workpieces with irregular surfaces | Stephen E. Savas | 2002-12-31 |
| 5915410 | Pneumatically operated positive shutoff throttle valve | — | 1999-06-29 |
| 5824293 | Nail polishing method and product | — | 1998-10-20 |
| 5094426 | Metering valve assembly | — | 1992-03-10 |
| 5063783 | Pressure monitoring and method | — | 1991-11-12 |
| 4994921 | Halftone imaging system and method | — | 1991-02-19 |
| 4958658 | Mass flow stabilized | — | 1990-09-25 |
| 4936772 | Flame ashing process and apparatus for stripping photoresist | — | 1990-06-26 |
| 4857136 | Reactor monitoring system and method | — | 1989-08-15 |
| 4845053 | Flame ashing process for stripping photoresist | — | 1989-07-04 |
| 4801241 | Modular article processing machine and method of article handling therein | Ninko T. Mirkovich, Thomas M. Rathmann, Roger B. Lachenbruch | 1989-01-31 |
| 4727993 | Wafer cassette having multi-directional access | Ninko T. Mirkovich | 1988-03-01 |
| 4632624 | Vacuum load lock apparatus | Ninko T. Mirkovich | 1986-12-30 |
| 4547248 | Automatic shutoff valve | Roger B. Lachenbruch | 1985-10-15 |
| 4539062 | Modular plasma reactor with local atmosphere | — | 1985-09-03 |
| 4431477 | Plasma etching with nitrous oxide and fluoro compound gas mixture | — | 1984-02-14 |
| 4418646 | Load lock valve | — | 1983-12-06 |
| 4392915 | Wafer support system | — | 1983-07-12 |
| 4342901 | Plasma etching electrode | — | 1982-08-03 |
| 4307283 | Plasma etching apparatus II-conical-shaped projection | — | 1981-12-22 |
| 4255230 | Plasma etching process | — | 1981-03-10 |
| 4230515 | Plasma etching apparatus | — | 1980-10-28 |