Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274312 | 3d surface scanning white light axial chromatism device | Fernando Valenzuela, Curt Deckert | 2019-04-30 |
| 8281648 | Material testing apparatus with non-contact sensor | — | 2012-10-09 |
| 7868473 | Wafer target design and method for determining centroid of wafer target | Bryan Hubbard | 2011-01-11 |
| 7709166 | Measuring the effect of flare on line width | David Ziger | 2010-05-04 |
| 7556893 | Self-compensating mark design for stepper alignment | — | 2009-07-07 |
| 7556900 | Measuring the effect of flare on line width | David Ziger | 2009-07-07 |
| 7442474 | Reticle for determining rotational error | — | 2008-10-28 |
| 7332255 | Overlay box structure for measuring process induced line shortening effect | Yuji Yamaguchi | 2008-02-19 |
| 7067931 | Self-compensating mark design for stepper alignment | — | 2006-06-27 |
| 7054007 | Calibration wafer for a stepper | David Ziger | 2006-05-30 |
| 6950187 | Method for determining rotational error portion of total misalignment error in a stepper | — | 2005-09-27 |
| 6889162 | Wafer target design and method for determining centroid of wafer target | Bryan Hubbard | 2005-05-03 |
| 6800403 | Techniques to characterize iso-dense effects for microdevice manufacture | David Ziger | 2004-10-05 |
| 6671048 | Method for determining wafer misalignment using a pattern on a fine alignment target | — | 2003-12-30 |
| 6639676 | Method for determining rotational error portion of total misalignment error in a stepper | — | 2003-10-28 |
| 6544859 | Semiconductor processing methods and structures for determining alignment during semiconductor wafer processing | David Ziger, Edward Dension | 2003-04-08 |
| 6541283 | Method for determining magnification error portion of total misalignment error in a stepper | — | 2003-04-01 |
| 6465322 | Semiconductor processing methods and structures for determining alignment during semiconductor wafer processing | David Ziger, Edward V. Denison | 2002-10-15 |
| 6301008 | Arrangement and method for calibrating optical line shortening measurements | David Ziger | 2001-10-09 |
| 6258611 | Method for determining translation portion of misalignment error in a stepper | — | 2001-07-10 |
| 5976741 | Methods for determining illumination exposure dosage | David Ziger | 1999-11-02 |
| 5972051 | Method and apparatus for removing particles from semiconductor wafer edges using a particle withdrawing means | Bryan D. Schmidt | 1999-10-26 |
| 5962173 | Method for measuring the effectiveness of optical proximity corrections | Sethi Satyendra, David Ziger | 1999-10-05 |
| 5960107 | Method for verifying an average topography height function of a photostepper | — | 1999-09-28 |
| 5902703 | Method for measuring dimensional anomalies in photolithographed integrated circuits using overlay metrology, and masks therefor | Sethi Satyendra, David Ziger | 1999-05-11 |