Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5972051 | Method and apparatus for removing particles from semiconductor wafer edges using a particle withdrawing means | Pierre Leroux | 1999-10-26 |
| 5392113 | Semiconductor wafer defect monitoring | Anthony Sayka, Stacy W. Hall, Judy Galloway, Pierre Leroux, Daniel David Siems +2 more | 1995-02-21 |
| 5350428 | Electrostatic apparatus and method for removing particles from semiconductor wafers | Pierre Leroux | 1994-09-27 |
| 5343938 | Method and apparatus for thermally insulating a wafer support | — | 1994-09-06 |